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FULL DESCRIPTION of Item 251431

in Other Etchers
Item ID: 251431

Offered 1 Offered at Best Price


PLASMA-THERM SLR 770 ICP Plasma Etcher

PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher

  • Single Process Chamber with SLR (Shuttle Lock Transfer) Load Lock
  • Manual Load with Load Lock Handling Currently Configured for 4” Wafers
  • Ceramic Wafer Clamp with Helium Backside Cooling System
  • Gas Distribution Box with 5ea Gas Channels
  • ENI ACG-6 RF Generator: 600W @ 13.56MHz
  • ENI Automatic Matching Network
  • RFPP RF20M RF Generator: 2000W @ 2.0MHz
  • RFPP Automatic Matching Network
  • Six Zone Chamber Heater with Temperature Controller
  • LEYBOLD 900 Turbo Pump with Mag 1000 Controller
  • MKS ITR Ion Gauge Controller
  • VAT Gate Valve with PM-5 Controller
  • Mechanical Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 phase

Location: Plano, Texas, United States
Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model SLR-770
Wafer Size Range 
  Minimum 75 mm
  Maximum 200 mm
  Set Size 100 mm
Process Inductively Coupled Plasma Etching
Controller Type PC Controller Type
End Point Detection Horiba Jobin-Yvon
Loadlock 
  Loadlock Yes/No YES
Number of Gas Inputs Five Gas
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model Neslab HX-75