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Offered at
$ 55,000.00
OnTrak DSS-200 Series II Double Sided Wafer Scrubber
OnTrak DSS-200 Series II Double Sided Wafer Scrubber - Cassette to Cassette Handling of up to 200mm Wafers
- Wet Send Elevator with Enclosure
- Double Sided Scrub Module
- Configured for PVA Brushes
- Single Spin Station – Edge Contact Only
- Megasonic Scrub Arm with Pre-Tech PT-005J Megasonic Generator
- IR Drying Lamp
- Wafer Output Module – Edge Contact Only
- GEM RS-232 Communication
- Touch Screen Color CRT Display
- SPECIAL NOTE: This tool has only been plumbed with DI water. No other liquids have been used.
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